JPH02138844U - - Google Patents
Info
- Publication number
- JPH02138844U JPH02138844U JP1679289U JP1679289U JPH02138844U JP H02138844 U JPH02138844 U JP H02138844U JP 1679289 U JP1679289 U JP 1679289U JP 1679289 U JP1679289 U JP 1679289U JP H02138844 U JPH02138844 U JP H02138844U
- Authority
- JP
- Japan
- Prior art keywords
- sample introduction
- introduction device
- measurement chamber
- preheating section
- internal volume
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims 2
- 230000005855 radiation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- -1 oxygen ions Chemical class 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011163 secondary particle Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1679289U JPH02138844U (en]) | 1988-12-26 | 1989-02-17 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32628388 | 1988-12-26 | ||
| JP1679289U JPH02138844U (en]) | 1988-12-26 | 1989-02-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02138844U true JPH02138844U (en]) | 1990-11-20 |
Family
ID=31717351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1679289U Pending JPH02138844U (en]) | 1988-12-26 | 1989-02-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02138844U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62132157A (ja) * | 1985-12-04 | 1987-06-15 | Hitachi Ltd | 質量分析装置 |
-
1989
- 1989-02-17 JP JP1679289U patent/JPH02138844U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62132157A (ja) * | 1985-12-04 | 1987-06-15 | Hitachi Ltd | 質量分析装置 |
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